Sensitive pressure control of carrier gases and air-over-liquid systems of solvents or pure water in semiconductor applications. The Selection Guide provides a summary of the 4 different Stainless Steel Pressure Regulators. The RS100 / HRS100 Series variations include:

• Extremely Sensitive to Down Stream Pressure Changes
• 316 Stainless Steel Body Constructions
• FKM and PTFE Diaphragms Optional
• Relieving and Non-Relieving Models Available
• Special Control Pressure Ranges Down to 3 PSI
• RoHS Compliance

Operations
Regulator
Low Pressure Regulator