The future of semiconductor equipment starts here.

Precision technology that advances your design.

Let us put our innovation and expertise to work for you!

Next-gen technology that’s smaller, lighter & faster.

The semiconductor equipment of the future will be more compact, offer higher purity, and be more accurate and reliable. Tomorrow’s equipment will do more using less power, delivering precision performance in a smaller footprint.

No one understands precision better than KOGANEI.

Accelerate your design and development process.

For more than 85 years, we have helped our customers design and build next-gen, game-changing equipment. Our Engineers have developed solutions for even the most challenging applications.

Utilize our standard and customized products.

We can assist you in specifying the components that best fit your needs from our more than 512,000 standard products, or we can work with you to create a unique solution that optimizes your machine’s functionality and performance.

Experience our unrivaled quality for yourself.

We are so confident in the performance of our products that we invite you to discuss your application with us to receive a complimentary sample for you to test and evaluate against the competition.

Solutions for Cleanrooms

KOGANEI offers innovative design and unmatched performance that meet and exceed the demands from OEMs that require clean operating environments. LEARN MORE

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Advantages

Applications

Precision and speed, from dicing to marking.

The Advantages of KOGANEI Technology

High Purity / Low Contamination

Valves

PTFE / PFA

Pure Process Valves

High Chemical
Compatibility

F-AVPN070

Fluoropolymer Valves

High Flow in
Small Envelope

Actuators

CS-BC Series

Compact Cylinders

ISO Class 5
Equivalent

CS-MGA Series

Mini Guide Sliders

ISO Class 5
Equivalent

Others

KSHC Series

Shock Absorbers

Silicon-Free, ISO
Class 5 Equivalent

PTFE / PFA

Fittings and Tubing

High Chemical
Compatibility

Accuracy & Repeatability

Valves

PTFE / PFA

Suck-Back Valves

Precision
Volume Control

KFPV Series

Proportional Flow Valves

Electrical Flow Control Pneumatic Valves

±2% F.S.
Repeatability

Actuators

MGT Series Mini

Mini Guide Tables

MGA Series Mini Guide Slider Precision Guided Actuators

±0.0002”
Running Parallelism

AC Series

Air Bearing Cylinder

Extremely Low
Friction

Others

PRS100 Series

Precision Regulators

±0.15 psi
Sensitivity

Tubephragm

Dispense Pumps

±0.1% Full Scale
Accuracy

Unique Performance

Valves

005 Series

Micro Valves

5.9 mm
Width

iB-Flow Series

Digital Flow Controls

Stepper Driven
Needle Valve

Actuators

TBDA Series

Twin Rod Guided Actuator

Low Speed Option
Down to 1 mm/s

NCT Series

Bernoulli Grippers

Handle Wafers
w/o Surface Contact

Others

PFA

Anti-Static Tubing

Conductive Surface
to Dissipate Charge

DTY-EPS01 Series

Electrostatic Sensors

24/7
Monitoring

Longer Life

Valves

F Series

Valves & Manifolds

100+ Million
Cycles

PVR Series

Media Isolation Valves

10 Million
Cycles

Actuators

BC Series

Compact Cylinders

15 Million
Cycles

BCG Series

Guided Actuators

10 Million
Cycles

Others

DTY-ELF14

Fan Type Ionizers

No Routine Needle
Maintenance

KSHP Series

Shock Absorbers

3 Million
Cycles

Advanced Applications Powered by KOGANEI

Semiconductor Front End

Silicon Substrate Processing
Oxidation & Nitride Film Deposition
Photoresist Coating
Etching
Ashing / Cleaning
Dielectric Film Formation
Planarization
Ion Implantation / Annealing
Contact & Interconnect Formation
Probe Testing

Semiconductor Back End

Dicing
Back Grinding Tape Laminating
Back Grinding
Die Bonding
Wire Bonding
Molding
Trimming / Forming
IC Testing
Marking

Photoresist Coating Equipment

Challenge: Reducing the waste of expensive photoresist materials while maintaining high speed throughput. At the same time generating the lowest amount of contamination and requiring the least maintenance.

Solution: Our patented F-EPT Series Tubephragm pump and F-AVPN070 Fluoropolymer valves provided excellent photoresist dispensing repeatability, low contaminate generation, and the least required maintenance, all while maximizing our customer’s profitability.

Applications - Semiconductor - Photoresist Coating Equipment

CVD Equipment

Challenge: Decreasing the installation space required by the pneumatic solenoid valve manifolds that control the system valves for the high vacuum chamber.

Solution: At only 5.9 mm wide, our 005 Series direct acting solenoid valves offered the smallest footprint and lightest weight manifolds, allowing the customer to meet their design criteria.

Applications - Semiconductor - CVD Equipment

Wafer Cleaning Equipment

Challenge: Reducing the risk of fire caused by an Electrostatic Discharge (ESD) event due to transporting Ultrapure Water (UPW) through insulative Fluoropolymer (PFA) tubing.

Solution: Our Anti-Static PFA Tubing has a conductive material on the surface that provided a ground connection point and eliminated the possibility of an ESD event.

Applications - Semiconductor - Wafer Cleaning Equipment

Back Grinding Equipment

Challenge: Reducing quality issues caused by unstable water flow at the cleaning nozzle during the wafer rinse process.

Solution: Our KFPV Series low hysteresis proportional control valve enabled tighter control of the water pressure to the cleaning nozzle, providing the customer with the stability needed to resolve their quality issues.

Applications - Semiconductor - Back Grinding Equipment

Die Bonding Equipment

Challenge: Minimizing damage to expensive tooling and other components due to crashing and vibration caused by incorrect machine set-up of the high-speed electric actuators.

Solution: Our KSHJ Series linear orifice shock absorbers were installed as emergency stops at the end of stroke of each actuator, dissipating the energy caused by the accidental crashing, and preventing damage to the critical components.

Applications - Semiconductor - Die Bonding Equipment

IC Testing Equipment

Challenge: Decreasing the frequency and duration of production stops required to maintain ionizers by measuring their performance and cleaning when compromised due to environmental contamination.

Solution: Our long life, self-cleaning DTY-ELF14HC fan type ionizers and DTY-EPS01 electrostatic sensors provided 24/7 performance monitoring and enabled a much longer maintenance interval, drastically reducing the customer’s costs and down-time.

Applications - Semiconductor - IC Testing Equipment