The future of semiconductor equipment starts here.
Precision technology that advances your design.
Let us put our innovation and expertise to work for you!
Next-gen technology that’s smaller, lighter & faster.
The semiconductor equipment of the future will be more compact, offer higher purity, and be more accurate and reliable. Tomorrow’s equipment will do more using less power, delivering precision performance in a smaller footprint.
No one understands precision better than KOGANEI.
Accelerate your design and development process.
For more than 85 years, we have helped our customers design and build next-gen, game-changing equipment. Our Engineers have developed solutions for even the most challenging applications.
Utilize our standard and customized products.
We can assist you in specifying the components that best fit your needs from our more than 512,000 standard products, or we can work with you to create a unique solution that optimizes your machine’s functionality and performance.
Experience our unrivaled quality for yourself.
We are so confident in the performance of our products that we invite you to discuss your application with us to receive a complimentary sample for you to test and evaluate against the competition.
Solutions for Cleanrooms
KOGANEI offers innovative design and unmatched performance that meet and exceed the demands from OEMs that require clean operating environments. LEARN MORE
Precision and speed, from dicing to marking.
The Advantages of KOGANEI Technology
High Purity / Low Contamination
Accuracy & Repeatability
Unique Performance
Longer Life
Advanced Applications Powered by KOGANEI
Semiconductor Front End
- Silicon Substrate Processing
- Oxidation & Nitride Film Deposition
- Photoresist Coating
- Etching
- Ashing / Cleaning
- Dielectric Film Formation
- Planarization
- Ion Implantation / Annealing
- Contact & Interconnect Formation
- Probe Testing
Semiconductor Back End
- Dicing
- Back Grinding Tape Laminating
- Back Grinding
- Die Bonding
- Wire Bonding
- Molding
- Trimming / Forming
- IC Testing
- Marking
Challenge: Reducing the waste of expensive photoresist materials while maintaining high speed throughput. At the same time generating the lowest amount of contamination and requiring the least maintenance.
Solution: Our patented F-EPT Series Tubephragm pump and F-AVPN070 Fluoropolymer valves provided excellent photoresist dispensing repeatability, low contaminate generation, and the least required maintenance, all while maximizing our customer’s profitability.
Challenge: Decreasing the installation space required by the pneumatic solenoid valve manifolds that control the system valves for the high vacuum chamber.
Solution: At only 5.9 mm wide, our 005 Series direct acting solenoid valves offered the smallest footprint and lightest weight manifolds, allowing the customer to meet their design criteria.
Challenge: Reducing the risk of fire caused by an Electrostatic Discharge (ESD) event due to transporting Ultrapure Water (UPW) through insulative Fluoropolymer (PFA) tubing.
Solution: Our Anti-Static PFA Tubing has a conductive material on the surface that provided a ground connection point and eliminated the possibility of an ESD event.
Challenge: Reducing quality issues caused by unstable water flow at the cleaning nozzle during the wafer rinse process.
Solution: Our KFPV Series low hysteresis proportional control valve enabled tighter control of the water pressure to the cleaning nozzle, providing the customer with the stability needed to resolve their quality issues.
Challenge: Minimizing damage to expensive tooling and other components due to crashing and vibration caused by incorrect machine set-up of the high-speed electric actuators.
Solution: Our KSHJ Series linear orifice shock absorbers were installed as emergency stops at the end of stroke of each actuator, dissipating the energy caused by the accidental crashing, and preventing damage to the critical components.
Challenge: Decreasing the frequency and duration of production stops required to maintain ionizers by measuring their performance and cleaning when compromised due to environmental contamination.
Solution: Our long life, self-cleaning DTY-ELF14HC fan type ionizers and DTY-EPS01 electrostatic sensors provided 24/7 performance monitoring and enabled a much longer maintenance interval, drastically reducing the customer’s costs and down-time.
